Brand: Precision semiconductor accessory series
Model No.: R10149（配套型号 R10210）
Product Name: CMP Repair Kit
Specifications
Applicable equipment: CMP chemical mechanical polishing equipment
Main components: Seals, retaining rings, wear pads, connecting fasteners
Sealing material: Fluororubber FKM
Operating temperature: 10℃ ~ 60℃
Applicable medium: Polishing slurry, deionized water
Application: Maintenance spare parts kit for CMP polishing module; used to replace worn and aging consumables of R10210 assembly, ensure polishing surface flatness, prevent slurry leakage and stabilize wafer processing quality
R10149 CMP Repair Kit R10210
Hde Shopping Event
Sale_coupon_15
$1,431.32
6-8weeks
6-8weeks
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Pick up from the HDE Store
Located in:Xi'an City China
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Courier delivery
Our courier will deliver to the specified address
- Courier delivery
DHL / Fedex / UPS / By Air
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